Silicon standards and precision standards for metrology

Vertical Standards VS

Typ A1 | DIN EN ISO 5436-1
Typ PGR | DIN EN ISO 25178-70

VS

Line Scales LS

Typ PAS/PRI | DIN EN ISO 25178-70

LS

Resolution Gratings RS
(also usable asLine Scales)

Typ PPR | DIN EN ISO 25178-70

RS-M

RS-N

Gratings Gr

different types | DIN EN ISO 25178-70

Gr-P

Gr-4P

Gr-D

Flatness Standards FtS

FtS

Thickness Standards TS

TS

Force Standards FS

FS-B

FS-C

Roughness Standards (areal) RnS

Typ AIR | DIN EN ISO 25178-70

RnS Si-l-c

RnS Si-l-f

Treasure Chest

Examples of available chips and structures

Products